Pulsed Arc Molecular Beam Film and Powder Production System

We propose to develop and commercialize a Pulsed Arc Molecular Beam Processing (PAMBP) process which can be used to produce high quality and high purity thin films as well as nanopowders. The PAMBP source uses a pulsed valve to generate gas pulses between two electrodes. During the gas pulse, an electric discharge is struck between the electrodes causing ablation of the cathode material. The ablation plume material is transported by the gas to a substrate for the deposition of a thin film. Alternatively, the plume material is sent through an expansion channel for production of nanopowders. This technology can be used to produce metals, metal nitrides, metal oxides, metal carbides, metal halides, carbon, metaUcarbon composites and other materials. The Phase I effort will concentrate on the PAMBP source design improvements and demonstration of thin films and nanopowder production capability. After a successful Phase I effort, we anticipate application for Phase II funds to develop PAMBP source and production systems into commercial products. We anticipate marketing PAMBP sources for incorporation into all forms of thin film coating equipment. We also anticipate the direct production and marketing of both nanopowders and specialty films and coatings. Development of the PAMBP technique as a thin film production technology will lead to a dramatic improvement in the manufacturing of a variety of products including optical and tribological films. The PAMBP source will also produce bulk quantity nanopowders of a number of materials not presently available in the commercial market.