Integration of Large-Scale Simulation and Controls for an RTP Chamber

Concurrent engineering is the simultaneous design of process and the control system to improve equipment development. Integrated Systems Inc. (ISI) proposes to create a software design tool for integration of a high fidelity simulation and model- based process control algorithms for semi-conductor equipment processes and apply it to a rapid thermal processing (RTP) chamber. In particular, it is proposed to develop the capability to interface general-purpose finite-element thermal and fluid-mechanical simulators with advanced process control algorithms. This new simulation capability will greatly enhance the industry's ability to prototype and test advanced fabrication equipment and control algorithms. Because the large-scale physically-based simulators represent the essential nonlinearities in the system, they can be used to develop sensor-to-actuator response surfaces before hardware is built. Enormous time and cost savings can be realized by testing control algorithms on simulators before building and testing hardware. The methods used will be compatible with robust control approaches. The simulation can be used to derive a set of linear models and quantitative measures of modeling errors for robust control. Methods for interfacing the controller to the simulation will be developed and demonstrated in Phase I. In Phase II, a variety of new designs will be performed and evaluated. Anticipated Benefits/Potential Applications - The integration technique will be validated on the model of an RTP chamber. As a result the potential commercial application is great. ISI envisions producing a stand-alone closed-loop simulation software product.