Compact, Rugged, Low-Cost Microspectrograph for Real-Time, In- Situ, Industrial Process and Quality Control

70620 Compact, rugged, and low-cost industrial process monitors are needed to improve industrial process yield and energy efficiency. Infrared and Raman spectroscopy are accurate and reliable methods used for quantitative laboratory chemical analysis. However, infrared sensors have not achieved appreciable penetration into industrial process control markets because conventional infrared and Raman instruments are bulky, expensive, high performance units. Based on advances in materials science, infrared spectroscopy, and advanced semiconductor process techniques, this project will develop a new class of MEMS-based ¿sensors-on-a-chip¿. These sensors will be compact, rugged, low-power, and have the potential to be very low-cost (<$20 each) when produced in large quantities. Phase I will demonstrate a rugged, compact microspectrograph that will simultaneously measure and report 128 different wavelengths while operating in the 7-14 ¿m wavelength range. Commercial Applications and Other Benefits as described by the awardee: Accurate, low-cost gas analyzers would have applications for environmental controls (automobiles, indoor air quality, emissions control), industrial process control (fermentation, end-point detection), and safety (carbon monoxide detectors, natural gas leaks). Existing technology does not meet all requirements at sufficiently low cost, accuracy, or lifetime.