Integrated Control System for an Adiabatic Demagnetization Refrigerator

There are emerging markets that are driven by advances in x-ray micro-calorimeters. These detectors allow an energy resolution 10x better than existing commercial x-ray detectors. The primary application is the detection and analysis of nanoscale particle contaminates in IC production. The temperature stability of the micro-calorimeter is critical for real-time analysis and maintaining the x-ray line positions. A cryogen-free ADR is used to provide temperatures less than 100 mK. However, there is not an existing control system that can provide the required temperature stability and complete cooling cycle automation. Lake Shore will develop a complete control system. This includes thermometry, magnet supply, precision sourcing, feedback loop and communication interface within a self-contained rack-mounted instrument. The control system will provide stability required for TES detector applications. COMMERCIAL APPLICATIONS: TES detectors are being used in new markets where the simplicity and compactness of an ADR and its control system is important. The ADR and its control system should be invisible to users, many of which will be unfamiliar with cryogenics. Micro-calorimeter enabled applications include the detection and analysis of nanoscale particle contaminates in integrated circuit production. This has an enormous potential for semiconductor manufacturing process improvement. Minimizing downtime, which can cost up for $500,000 per hour, and improving process yields will have a wide reaching national economic benefit. Other applications include material analysis of ceramic and metals, large-molecule (DNA) spectrometry, gamma and neutron radiation detectors, and astrophysics detectors.