COARSE MODELING FOR LARGE SCALE MOLECULAR DYNAMICS

Not Available A compact X-ray tube assembly comprises an evacuated chamber enclosed by a ceramic tubular envelope, an attached power supply at one end connected to an emitter inside the chamber, electrostatic means for focusing a beam of electrons on a metal foil target, an end window at the other end comprising said target, the thickness and composition of the metal foil target and the e-beam energy being selected to generate a microfocused bright beam of x rays of a preselected energies. The compact assembly is useful in materials and aligment for resist layers for chip fabrication and for materials inspection. BENEFITS: An end-window x-ray target design brings about an x-ray generator with greatly improved efficiency and photon spectrum purity. The x-ray generator has a micro-focused focal spot, is light in weight, and is particularly useful for high resolution portable appications in manufacture process monitoring, and for materials inspection. Serving both the military and industry functions.