Indium Phosphide Material for Microwave and Millimeter-Wave Monolithic Integrated Circuits

Parke Mathematical Laboratories proposes to develop and commercialize the magnetic liquid encapsulated Kyropoulos (MLEK) growth process for the cost effective production of 3" diameter indium phosphide (InP) substrates for microwave and milleter wave device applications. The MLEK InP growth technology is being developed by Parke Mathematical Laboratories and Rome Air Development Center personnel. In Phase I, Parke Mathematical Laboratories will develop the plan for the cost effective production of 3" diameter InP substrates. We will identify the key growth and processing technology development and implementation issues for the MLEK process. In phase I attempts will be made to grow 3" diameter InP single crystal using a polycrystalline charge of InP. In Phase II, we will design, build and operate a custom MLEK system that will encompass the technology developments and improvements highlighted in the Phase I plan. The 3" diameter InP crystals will be grown, processed and characterized. Several InP substrates will be tested for microwave and millimeter wave device performance. Reproducible growth of 3" diameter InP crystals with improved device performance will prove essential for successful Phase III commercialization. In Phase II, we will team with High Temperature Engineering, an internationally recognized electronic equipment company, and establish a commercial US supply of high quality InP substrates for microwave and millimeter wave device applications. The technology transfer of the MLEK growth process from the Air Force to Parke Mathematical Laboratories will take place in this phase. Anticipated Benefits/Potential Applications - The cost effective production of high quality 3" diameter InP substrates will result in higher yields, improved reproducibility and lower costs for microwave and millimeter wave devices in military as well as commercial applications.