Novel MEMS Chemical Sensors for Gasification

76174-Chemical sensors will make a significant contribution to the development of gasifiers, a key technology for many energy-related needs of the future. Specific sensors are needed for process components like methane, hydrogen, and toxic and corrosive contaminant gases like hydrogen sulfide and carbon monoxide. This project will develop low cost, high performance sensors by incorporating new sensor technology and MEMS (micro-electro-mechanical systems) fabrication. Phase I will fabricate a prototype MEMS sensor platform and functionalize it for two different applications: one thermal/catalytic and one electrochemical. The feasibility of a single MEMS platform will be demonstrated for multiple sensor applications. Ultimately, the sensors will be tested for sensitivity, selectivity, response time and stability for gases such as methane and hydrogen sulfide. Commercial Applications and Other Benefits as described by the awardee: In addition to the gasifier application, additional benefits from the sensors developed include safety, homeland security, and medical markets. The total market for MEMS sensor is $2B, and the chemical sensor market is one of the most rapidly growing segments.