SBIR/STTR Research Award
A Micro-Electroformed Cross Capacitor (MECC)
Award amount
$74,852Program and phase
SBIR · Phase IAward year
2002Award details
- Awarding agency
- Department of Commerce
- Branch
- Not reported
- Recipient company
- RESEARCH SUPPORT INSTRUMENTS, INC.
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- N81WE4N3Y997
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
Utilizing new hard, etch resistant photoresists derived from epoxy formulations such as SU-8 to serve as the mold for electroless metaldeposition for MEMS electroforming techniques, a fully micro-miniaturized cross capacitor can be realized. A Micro-Electroformed Cross Capacitor (MECC) is built by electroforming high aspect metals atop the substrate. A Phase 1 effort would model MECC performance, develop the process steps for fabrication, and finally demonstrate the ability to fabricate a micro-miniaturized cross capacitor.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Gyroscopic Inertial Micro-Balance Attitude Locator (GIMBAL)
- Gyroscopic Inertial Micro-Balance Azimuth Locator (GIMBAL)
- Friction-Sensing Reflector Array Patches (FRAP)
- Micro-Universal Fit Fasteners (MUFF)
- Micro-Actuator Speaker System 2 (MASS-2)
Research funding history
44 SBIR/STTR records share this UEI (1991–2010). Reported award amounts total $7,769,270. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Defense, National Aeronautics and Space Administration, Department of Commerce, Department of Energy, National Science Foundation