Micro-machined Vibration Sensor for Space Systems

Microsensors and actuators based on microelectromechanical (MEM) technology are still in the early development stage with some components, such as accelerometers, now commercially available. Microactuators are still mostly experimental. An excellent application for microsensors is a vibration sensor. The groundwork for producing frequency selective vibration sensors using piezoresistive materials on cantilevered beam harmonic oscillators has already been done. The purpose of this proposed effort is to produce the best device design for monitoring vibrations in equipment and to optimize the design for prototype fabrication. The goal is to devleop an integrated micromechanical sensor that can be used to measure the vibrational modes of operating equipment in high "g" and other adverse envirioments including Space systems. This device will instantaneously provide frequency selective information about the vibrational modes, eliminating the need for Fourier transforms, in the frequency range from very low to ultrasonic frequencies. It will have minmum energy consumption requirements and be extremely small and light making it ideal for space applications.