Real-time 3-D quantitative imaging by a slit-scan chromatic confocal microscopy

We propose to develop a precision 3-D quantitative imaging technique using a slit chromatic confocal microscope. In contrast to the existing 3-D imaging methods, the proposed technique is capable of acquiring a depth-section image in a single shot, and then scanning through the remaining lateral direction for complete 3-D object information. The advantages of the proposed system over conventional techniques include the ability of the novel method to perform a single-shot measurement of a surface cross-section, a simpler and therefore less expensive optical system design, and simplified signal and image processing that can be realized with an inexpensive computing system. These advantages make our novel technique suitable for performing on-line 3-D imaging/measurement in a realistic manufacturing system and even possibly in a severe manufacturing environment. The main goal of phase I of this project will be to perform a detailed design of the proposed 3-D quantitative imaging system, construction and testing of the initial system prototype, characterization of system functionality and performance, and development of computer software for data acquisition, signal and image processing. The work will set stage for phase II, of which the objective is to build a commercial viable prototype in coordination with industry standards.