SBIR/STTR Research Award
Micro-Positioner Replacement of Piezo Actuators in Long-working Distance Interference Microscopes
Award amount
$89,444Program and phase
SBIR · Phase IAward year
2009Award details
- Awarding agency
- Department of Commerce
- Branch
- National Institute of Standards and Technology
- Recipient company
- E. M. Optomechanical, Inc.
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- Not reported
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
The NIST patented six-degree of freedom micropositioner technology associated with this subtopic has been identified by E M Optomechanical, Inc. (EMOM) as a technology that could be incorporated into the company¿s long-working distance interference microscopes. A key element in these microscopes is a piezo-actuator device, installed in a manual pitch/yaw mount, which translates a small flat mirror in nanometer-scale motions. Drawbacks in using piezo-actuators include their cost, fragility, non-linear motion, hysteresis, and high dc voltages required. EMOM believes the NIST patented micro-positioner technology could be used to develop a three-axis actuator that could replace the piezo-actuator and the pitch/yaw mount thereby improving performance and reducing cost. For this project, EMOM has assembled a highly qualified technical team also experienced in the successful commercialization of work funded through the SBIR program and other government funded research.
Technology keywords
Not reported