Innovative Nanoimprint Tools for Optoelectronic Applications

Molecular Imprints, Inc. (MII) is a startup company in Austin, Texas, set up to develop and manufacture a unique line of nano-resolution lithography and associated semiconductor equipment based on a proprietary new technology developed at the University ofTexas at Austin. MII has acquired exclusive rights to the intellectual property associated with Step and Flash Imprint Lithography (S-FIL) technology. S-FIL technology has the potential for being a low-cost, sub-50 nm, high-throughput process that hasbeen carefully designed to substantially exploit the existing infrastructure in the semiconductor industry.MII would like to investigate the extension of S-FIL technology to the area of compound semiconductor substrates. These materials are known to be fragile, and have significant material compatibility issues at high temperatures. This proposed effort willexplore the development of novel nanoimprint tools for processing compound semiconductor wafers without the use of high pressures and temperatures. The proposed research will lead to nano-lithography tools that can reliably and repeatably allow patterning of compound semiconductor devices with high process yields.