SBIR Phase I: Low Noise Scanning Thermal Microscopy for Defect Detection and Characterization of Semiconductor Materials

This Small Business Innovation Research (SBIR)Phase I project addresses a scanning thermal microscope (SThM) system, which can be used for measuring thermal parameters such as temperature, thermal conductance, and heat capacity in nanotechnology, semiconductor, and biological applications. The SThM system consists of a micromachined scanning probe, an interface circuit, a scanning stage, and instrumentation to synchronize and control the individual components. This proposal addresses critical issues regarding its feasibility as a commercial product by evaluating the manufacturability, robustness, accuracy, repeatability, and ease of use of the SThM system as a whole and by extending the potential applications. The tool is intended for use not only by researchers, but also for pre-college education in nanotechnology and microelectronics. It is also intended for use in process monitoring for yield and reliability in manufacturing applications. Since the technology being evaluated for commercialization originated in an educational institution and will be licensed from it, this effort will indirectly serve to support higher education if successful. This effort will also provide an avenue for undergraduate student involvement in a variety of areas ranging from microfabrication to circuit design to testing the scanning thermal systems.