SiC accelerometers for harsh environments

Sensors and control electronics based on SiC offer an opportunity to realize systems with operating temperatures approaching 500 degrees C. The unique high temperature properties and chemical robustness of SiC make it an ideal choice for applications where generic components and sensors need to function under widely varying environmental conditions The wide range of environments in which military hardware must function requires sensors which have a high degree of temperture and chemical robustness. We proposed to fabricate SiC accelerometers using surface micromachining techniques which are capable of sustained operation in harsh environments such as active guidance systems for artillery projectiles. SiC has been primarily viewed as a material suited to high temperature electronics and blue light emitting diodes. We believe this to be the first attempt to leverage the intrinsic properties of SiC for stand alone sensing applications. These sensors will also be useful in other applications where corrosion resistance and high temperature performance are critical such as semiconductor processing equipment and automobile engine monitoring.