Modulation-Doped A1 GaN/Gan Heterostructures and Devices on Semi-Insulating SIC Substrates

The need for compact solid state ultraviolet light sources includes clinical light sources for a variety of surgeries, analytical instrumentation sources and communications systems based on shorter wavelengths that will be able to handle higher information densities. Such advanced optoelectric applications demand totally new materials. Of those available, silicon carbide is the most promising for near term applications since in many ways it be processed like silicon. Several deficiencies presently limit the acceptability of silicon carbide including the commercial availability of semiconductor grade silicon carbide crystals and wafers and the low efficiencies of optoelectronic devices based on this material. Advanced Technology Materials, Inc. has developed a new approach to the growth of silicon carbide crystal which addresses both problems. Successful growth of these crystals will permit the fabrication of extremely efficient and compact solid state UV light sources.