Robust MEMS Viscosity Meter for Condition-based Maintenance

The use of real time, in situ measurements of lubricant/refrigerant viscosity can reduce maintenance costs and system downtime and improve system longevity, by allowing maintenance personnel to determine identify and correct mechanical problems, before they cause more serious problems. With the advent of MicroElectroMechanical Systems (MEMS), the opportunity exists to develop small and inexpensive devices to measure the fluid viscosity real time and in situ. However, the temperatures, pressures, and corrosive environments inside typical refrigerant compressors exceed the capabilities of materials typically used to manufacture MEMS devices. Boston MicroSystems' proprietary technologies for micromachining harsh environment compatible SiC and AlN materials enable, for the first time, fabrication of small, inexpensive and robust MEMS-based fluid viscosity sensors for non-intrusive health monitoring and condition based maintenance of refrigeration systems, engines, and other machinery. In Phase 1, Boston MicroSystems will leverage from work on previous and ongoing FAA, ATF and NSF programs to test three already developed devices, microresonators, SAWs and FPWs, for their applicability as in situ fluid viscosity sensors for condition based maintenance of compressors in refrigerant systems.