MULTILAYER FERROELECTGRIC CAPACITOR FOR HIGH ENERGY DENSITY STORAGE DEVICES

Roust, multilayer thin-fim ferroelectric capacitors are proposed that provide high electrical energy density storage at high voltage and high electric field. This is accomplished through a combination of novel planar internal structures and state-of-the art fabrication procedures. Modeling utilizing semiconductor heterojunction device physics predicts that large improvements in energy storage density can be achieved over conventional capacitor technologies with the proposed approach. Additionally, fabrication procedures are outlined that allow large area multilayer capacitors to be economically constructed using diverse types of extremely pure organo-metallic precursors in an electrospray metallo-organic chemical vapor deposition process.