Environmental Sensor Using Micro-Opto-Electro-Mechanical Systems (MOEMS)

50934-98-I Environmental Sensor Using Micro-Opto-Electro-Mechanical Systems (MOEMS)--IntelliSense Corporation, 16 Upton Drive, Willmington, MA 01887-1041; (978) 988-8000 Dr. Salah Khodja, Principal Investigator Ms. Laura Huber, Business Official DOE Grant No. DE-FG02-98ER82600 Amount: $75,000 There is currently a need for long term environmental monitoring by low-maintenance sensors. Such systems should be low cost, highly reliabile and suitable for deployment in a range of natural environments. This project will develop such a micromachined sensor element which combines the best features of fiber optic and micromechanical approaches. The sensing element will be developed using a unique micro-opto-electro-mechanical (MOEMS) technology. The MOEMS microchip sensing element can be configured in fiber optic distributed arrays or as stand alone sensors. In Phase I an environmental monitoring system using MOEMS technology sensors will be developed. Critical experiments will be conducted; simulation, modeling and commercialization studies will be performed. The result will be a proof-of-concept definition. Commercial Applications and Other Benefits as described by the awardee: Commercial applications should include industrial process control, hazardous gas monitoring and biomedical sensors and analysis._