Deposition of Magneto-Optical Thin Films on InP by PE-MOCVD for Waveguide Isolators in Optoelectronic Integrated Circuits

The integration of thin-film magneto-optic waveguide insolators with solid state lasers is essential for the realization of low cost compact optielectronic integrated circuits. In a Phase I program, NZ Applied Technologies (NZAT) proposes to utilize its own unique low temperature plasma-enhanced metalorganic chemical vapor deposition (PE-MOCVD) process for the formation of large Faraday rotation rare-earth substituted yttrium iron garnet films on InP seminconductors. NZ's film fabrication process offers advantages of high deposition rate, step coverage, and uniform deposition over large areas. A film of MgO, which we have already used successfully with the depostion of electro-optic oxide films on GaAs, will be incorporated as a buffer layer between the magneto-optic waveguide isolators and the InP host. The feasibility of a prototype waveguide isolator on an InP wafer will be demonstrated in Phase I of this program. The success of this program will lead to an abundant use of these film devices in many optical communications systems.