SBIR Phase I: Low Temperature Formation of Polycrystalline Ferroelectric BaTiO3 Thin Films

This Small Business Innovation Research (SBIR) Phase I project will develop a process for growing ferroelectric, polycrystalline barium titinate (BaTiO3) thin-films, by anodic oxidation of polycrystalline titanium, in a barium hydroxide (BaOH2) electrolyte. By utilizing this novel, low-cost method of ferroelectric formation, it will be possible to obtain thin, uniform ferroelectric films at relatively low temperatures (less than 100C) that exhibit dielectric constants around 200. Though films of this nature find applications in various other electrical devices, the company will utilize this novel technology, if successful, for integral thin-film decoupling capacitors due to the significant advantages offered over traditional discrete decoupling capacitors. Another potential application is optical waveguides. Ferroelectric thin films have applications in thin-film passive components as well as optical waveguides.