SCANNING TUNNELING MICROSCOPE FOR SUBMICRON DELINEATION IN SEMICONDUCTORS

IMPROVING THE CAPABILITY FOR DELINEATING SUBMICRON FEATURES ON SEMICONDUCTORS IS NECESSARY FOR PRODUCING MORE POWERFUL DEVICES. THE COMMERCIAL SCANNING ELECTRON MICROSCOPE (SEM) FOR SUBMICRON IMAGING IS AVAILABLE BUT CUMBERSOM, EXPENSIVE, AND LIMITED IN RESOLVING POWER. RESOLUTION TO ATOMIC DIMENSIONS HAS BEEN DEMONSTRATED IN THE LABORATORY WITH DEVELOPMENT OF THE SCANNING TUNNELING MICROSCOPE (STM). THIS INSTRUMENT OFFERS DIRECT IMAGING CAPABILITY TO SUBMICRON RESOLUTION AND PROMISES TO BE MORE CONVENIENT TO USE AND LOWER IN COST THAN THE SEM. HOWEVER, SEVERAL TECHNICAL PROBLEMS MUST BE SOLVED BEFORE A COMMERCIALLY VIABLE STM CAN BE REALIZED. WE PROPOSE TO STUDY THE FEASIBILITY OF DEVELOPING A COMMERCIALLY VIABLE STM THAT IS CAPABLE OF DISTINGUISHING FEATURES ON THE ORDER OF FIFTY ANGSTROMS. INNOVATIVE APPROACHES WILL BE SOUGHT TO PROBLEMS IN: STAGING USING PIEZOELECTRIC CERAMICS, PRODUCING TIPS RELIABLY, ISOLATING VIBRATIONS, AND PROVIDING LOW COST DATA PROCESSING CAPABILITY.