SBIR/STTR Research Award
SBIR Phase I: High Volume MOCVD AlGaN Production Tool
Award amount
$100,000Program and phase
SBIR · Phase IAward year
2002Award details
- Awarding agency
- National Science Foundation
- Branch
- Not reported
- Recipient company
- STRUCTURED MATERIALS INDUSTRIES, INC.
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- WMLSF59AE7E1
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
This Small Business Innovation Research (SBIR) Phase I Project will develop a high volume/high pressure RDR-MOCVD nitride production tool. Two fundamental problems will be addressed. The first is the need for large area substrate quality and the second is the need for large area/high volume MOCVD nitride epitaxy production tools. This project will demonstrate a scaleable tool to meet these needs.
The commercial applications of this project will be in electronics and optoelectronic device markets.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- SiC Low Gain Avalanche Diode (LGAD) for Minimum Ionization Particle (MIP) sensors
- Optimal Radiation Tolerant High Intensity High Temperature Photovoltaics
- Large Area InGaN/GaN MQW p-i-n Avalanche Photodiode Cherenkov Radiation Detectors
- High Performance High Current CW polarized photocathodes for Electron Ion Colliders
- Innovative Equipment Large Single Crystal CdZnTe Production for Long-Wave Infrared Detector Arrays
Research funding history
177 SBIR/STTR records share this UEI (1992–2024). Reported award amounts total $45,517,958. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Defense, Department of Energy, National Aeronautics and Space Administration, National Science Foundation, Department of Commerce, Department of Homeland Security