Enhanced Process Development for Inteferometric Modulators

Etalon has recently demonstrated a fundamentally new display technology based on a novel Microelectromechanical (MEM) Structure. Relying on interference, these interferometric modulators (IMods) are simple membrane structures whose colors change when deformed electrostatically. This innovative device and process exploit the unique potential which results when combining the vase range of thin film optical designs and MEMs. IMods have already demonstrated drive voltages of 35 volts, response times of 20 usecs, and hysteresis. The latter results from its inherent electro-mechanical behavior and precludes the need for a costly active matrix. IMods can be designed to switch from any color to black, or any other color, with theoretical pixel contrast ratios exceeding 100:1. Fabricated monolithically, unlike assembly oriented FPD alternatives, the IMod is being developed as the core for a new generation of full-color, video rate, reflective FPDs. High ambient performance, due to efficient interference effects, makes possible exceptionally bright reflective displays. Such displays could represent arrays. The goal of this effort will be to further refine an existing IMod fabrication process and enhance yields. Optionally, the development of electromechanical and optical model will be initiated.