High-Precision Interferometer for Deformable Mirror Testing

Deformable mirrors have played a significant role in compensation of propagation path errors in ground based imaging and power projection systems. New and unique applications are being developed for photolithography and space based telescopes and real time diagnostic interferometers are required for control and analysis of their figure changes. Development of extensions of the frequency shifting interferometric techniques can meet all of the stressing requirements for obtaining these measurements including temporal resolutions below 10 microseconds, phase resolutions below 1/1000 wave, and spatial resolutions to 10 microns. Yet further extensions of this technology would allow testing of the aspheric optical figure of mirrors such as the Hubble without the use of the troublesome null lens. Extensions of this technology can play a significant role in diagnoses and control of adaptive optical systems and testing of large aspheres without the use of a null lens.