SBIR/STTR Research Award
SBIR Phase I: Model-Based Control for Chemical-Mechanical Planarization of Copper/low-k Films
Award amount
$100,000Program and phase
SBIR · Phase IAward year
2008Award details
- Awarding agency
- National Science Foundation
- Branch
- Not reported
- Recipient company
- SC SOLUTIONS, INC.
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- MGPZGMNLJ8R9
- Solicitation number
- NSF 00-144
- Topic code
- EL
Research abstract
This SBIR Phase I project will develop model-based control of electro-chemical mechanical planarization systems used for future generations of semiconductor manufacturing. The model-based control will incorporate critical system knowledge to improve wafer uniformity and system throughput. The successful completion of this project will assist in the adoption new dielectric structures for next generation electronic devices. It may also enhance the understanding of electropolishing and electroplating processes. Optimization of the processes will also reduce environmentally sensitive waste.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Quantum Control Optimization Methods
- Quantum Control Optimization Methods
- Use of High-Resolution Imaging Techniques for Condition Assessment and Damage Detection of Bridges
- Software Tools for Scalable Quantum Validation and Verification
- Digital Twins for Bridge Management through the Integrating of Computer Vision and Finite Element Models
Research funding history
21 SBIR/STTR records share this UEI (1999–2021). Reported award amounts total $6,947,176. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: National Science Foundation, Department of Defense, Department of Energy, Department of Transportation, Department of Commerce