SBIR/STTR Research Award
PATTERNED ETCHING OF INFRARED DETECTOR ARRAYS
Award amount
$59,890Program and phase
SBIR · Phase IAward year
1990Award details
- Awarding agency
- Department of Defense
- Branch
- Army
- Recipient company
- AERODYNE RESEARCH INC
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- HTMHV7AL9A86
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
WE PROPOSE TO DEVELOP A PATTERNED ETCHING TECHNIQUE FOR INFRARED DETECTOR ARRAYS BASED ON PHOTO-INDUCED ETCHING OF HGCDTE THAT IS COMPATIBLE WITH THE ULTRA-HIGH VACUUM ENVIRONMENT OF A MOLECULAR BEAM EPITAXY APPARATUSES. THE PHASE I RESEARCH FOCUSES ON ESTABLISHING THE EFFICACY OF SUITABLE GAS PHASE PRECURSORS FOR THE ETCHING PROCESS. IF THE PHASE I RESEARCH IS SUCCESSFUL, OPTICAL PROJECTION TECHNIQUES WILL BE USED TO PRODUCE ARRAY STRUCTURES. SIMILAR TECHNIQUES MAY BE SUITABLE FOR MAKING OHMIC CONTACTS TO THE MESAS FORMED BY THE ETCHING STEP.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Airborne Spectroscopic Static Temperature Sensor
- Real-time mapping of dissolved sulfur in soil with high spatial and temporal resolution
- Autonomous Method to Quantify and Localize Hydrogen Facility Emissions
- Autonomous Method to Quantify and Localize Hydrogen Facility Emissions
- Autonomous Shortwave Spectroradiometer for Retrieval of Cloud Properties from Marine Platforms
Research funding history
410 SBIR/STTR records share this UEI (1983–2025). Reported award amounts total $116,799,166. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Defense, Department of Energy, National Aeronautics and Space Administration, National Science Foundation, Environmental Protection Agency, Department of Commerce