Integrated MEMS Inertial Measurement Unit for Air-Launched Munitions

"We propose to fabricate a planar MEMS Inertial Measurement Unit that is fabricated on one chip and mounted onto one package, that meets the requirements for air-launched munitions applications. Integration of the full set of gyros and accelerometers isnecessary to reduce the costs associated with assembly and alignment of the instruments onto an IMU structure. A common package is necessary to reduce the overall size, provide a common environment and further reduce cost. To realize a successfulintegrated IMU, the approach is to use gyros and accelerometers that are based on a common design and are subject to common fabrication process constraints. Commonality simplifies the design, improves yield and enables a greater understanding of operationand compensation. Integration also causes a paradigm shift, enabling the instrument designer to become the IMU designer."