SBIR Phase II: Ultraviolet Laser for Ultra-high-resolution Photoemission Spectroscopy
Award amount
$500,000Program and phase
SBIR · Phase IIAward year
2009Award details
- Awarding agency
- National Science Foundation
- Branch
- Not reported
- Recipient company
- LUMERAS LLC
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- H6WJXDXC2A16
- Solicitation number
- NSF 06-598
- Topic code
- EL
Research abstract
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Long Coherence Length 193 nm Laser for High-Resolution Nano-Fabrication
- SBIR Phase I: Ultraviolet laser for ultra-high-resolution photoemission spectroscopy
- SBIR Phase II: High-resolution, high-precision 193-nm photomask phase metrology system
- SBIR Phase II: High-resolution, high-precision 193-nm photomask phase metrology system
Research funding history
5 SBIR/STTR records share this UEI (2004–2009). Reported award amounts total $1,298,991. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: National Science Foundation, Department of Defense