SBIR/STTR Research Award
THE PROPOSED PROJECT ADDRESSES IMPROVED MASK TECHNOLOGY FOR ION BEAM LITHOGRAPHY.
Award amount
$69,322Program and phase
SBIR · Phase IAward year
1986Award details
- Awarding agency
- Department of Defense
- Branch
- Navy
- Recipient company
- Spire Corporation
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- RG46KJGARZF4
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
THE PROPOSED PROJECT ADDRESSES IMPROVED MASK TECHNOLOGY FOR ION BEAM LITHOGRAPHY. SPECIFICALLY, TECHNIQUES FOR PERFECTING THE SILICON MEMBRANE USED IN SUCH MASKS ARE PRESENTED, AND RESEARCH INTENDED TO INCORPORATE SUCH TECHNIQUES IN MEMBRANE FABRICATION IS PROPOSED. IN PHASE I, THE FEASIBILITY OF BOTH IMPROVING THE CRYSTALLINE PERFECTION AND OF ALTERING THE STRESS IN THE MEMBRANES WILL BE EVALUATED. TECHNIQUES INVOLVING BOTH EPITAXY AND ION IMPLANTATION WILL BE INVESTIGATED. IN PHASE II RESEARCH ON IMPROVED MEMBRANES WILL BE CARRIED OUT. THIS RESEARCH WILL BE BASED UPON THE APPROACHES DETERMINED TO BE FEASIBLE IN PHASE I. THE MEMBRANES THUS DEVELOPED WILL BE MADE AVAILABLE TO THE INDUSTRY AS PART OF THE COMMERCIALIZATION IN PHASE III.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Portable Laser Hazard Identification and Monitoring System
- Nano-Crystalline Ceramic Coatings for the Reduction of Sliding Resistance of Orth
- A Synthetic Biology Toolbox for Natural Product Discovery from Actinomycetes
- Next-Generation, LED-based, Adjustable Spectrum, Pulsed Solar Simulator
- Nano-Crystalline Ceramic Coatings for the Reduction of Sliding Resistance of Orth
Research funding history
429 SBIR/STTR records share this UEI (1983–2014). Reported award amounts total $73,907,551. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Defense, National Aeronautics and Space Administration, National Science Foundation, Department of Energy, Department of Health and Human Services, Department of Commerce