SBIR/STTR Research Award
NANOMETER ETCHING OF GALLIUM ARSENIDE WITH THE SCANNING TUNNELING MICROSCOPE
Award amount
$49,968Program and phase
SBIR · Phase IAward year
1988Award details
- Awarding agency
- Department of Defense
- Branch
- Army
- Recipient company
- J. & D. Scientific, Inc.
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- Not reported
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
SCANNING TUNNELING MICROSCOPY (STM) HAS BEEN DEMONSTRATED TO BE VALUABLE IN THE STUDY OF SURFACES. THE RESULTS OF THESE SURFACE STUDIES INDICATE THAT STM CAN ALSO BE USEFUL FOR SURFACE MODIFICATION ON THE NANOMETER SCALE. HOWEVER, BEFORE THIS POTENTIAL CAN BE FULFILLED, IT MUST BE DEMONSTRATED THAT THE STM CAN BE USED REPRODUCIBLY FOR SOLUTION ETCHING. THE GOAL OF THIS RESEARCH IS TO DEMONSTRATE THAT THE STM HAS THE CAPABILITY OF ETCHING GAAS AT THE SUBMICROMETER LEVEL.
Technology keywords
Not reported