Incorporation of Silicon Carbide in MEMS-Based Micro-Rocket Engines

Propulsion systems that provide high thrust to weight and minimal mass are necessary for the planned generation of nanospacecraft and nanosatellites. MEMS-based Micro-Rockets utilizing silicon semiconductor fabrication technologies are predicted to produce such high efficiency systems at a low unit cost. To achieve the necessary specific impulse and thrust levels, these devices must operate at significantly higher pressures and temperatures as compared to conventional thrust chambers. Therefore a refractory material that possesses excellent thermo-mechanical properties is necessary within the combustion chamber and the expansion nozzle. Silicon carbide (SiC) is a refractory material with the necessary thermo-mechanical behavior as well as possessing compatibility with silicon MEMS processing. The Phase I effort will demonstrate the fabrication of a SiC thrust chamber liner within a predominantly silicon MEMS. The silicon carbide will be produced by selective chemical vapor deposition, which eliminates the need for etching SiC or mechanically planarizing the SiC coated wafers. The thermo-mechanical performance of the silicon carbide coated silicon will be measured at temperatures up to 1473 K to demonstrate the benefits of incorporating a refractory liner within a Micro-Rocket.