Micro-Machined Integrated Silica/Si Optical Waveguide Mechanical Sensors

NZ Applied Technologies (NZAT) proposes to develop a mechanical sensor and sensor array which potentially have one order of magnitude improved sensitivity over the current state-of-the-art sensors. The technology is based on fabricating flexible/movable integrated optical waveguide structures on Si substrates using micro-machining process. These sensors can be used in harsh environment, such as high temperature up-to 300 _C, and immunity to high levels of electrical-magnetic interference. Sensors having different functions can be integrated, batch-produced on the same chip. The approach can greatly lower the price of multiple-function smart sensor systems due to the mass production capability and great reduction of the external optical fiber connections. NZAT will adapt the mature waveguide technology and develop a new micro-machining scheme to demonstrate a prototype mechanical sensor and sensor array.