SBIR/STTR Research Award

STTR Phase II: Advanced Control of Electron-Beam Deposition for High Precision Optical Coatings

Award identifier 4f5e37fcc1fb6c52c8b7bed09e73b9ccc5a14d5e42ab83a1745136f40bca10d2Awarding agency National Science Foundation

Award amount

$499,940

Program and phase

STTR · Phase II

Award year

2006

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Award details

Awarding agency
National Science Foundation
Branch
Not reported
Recipient company
Cyber Materials LLC
Proposal award date
Not reported
Contract end date
Not reported
UEI
Not reported
Solicitation number
NSF 05-535
Topic code
EL

Research abstract

This Small Business Technology Transfer (STTR) Phase II project leverages the substantial improvements in e-beam process control capability developed in Phase I into an integrated control system that can significantly increase yield and throughput for the $1.8 billion precision optical coating industry. Manufacturing partners indicate that the target performance levels would cut manufacturing costs by 35% and enable manufacturers to routinely achieve greater tolerances for advanced designs. This research is driven by a first-principles systems based approach that has created new intellectual property for monitoring, control, and process design. Commercially, precision optical coatings are critical components for all optical instruments including microscopes, telescopes, vision and imaging systems, projection systems, and laser systems. Coatings have served these industries for years, but in a world where application requirements and scientific inquiry are constantly advancing, precision coatings are demanded that comply with even tighter tolerances. In particular, high energy laser science such as the NIF facility at Livermore require very precise and reliable coatings. This STTR research will be key to further improving manufacturing capabilities for a variety of important applications.

Technology keywords

Not reported

Agency intelligence

National Science Foundation

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