ELECTROLYTIC REGENERATION OF ACID COPPER CHLORIDE ETCHANT

THE PROPOSAL CONCERNS DEVELOPMENT OF AN ELECTROLYTIC PROCESSFOR THE ON-LINE REGENERATION OF ACID CUPRIC CHLORIDE ETCHING BATHS. CHEMICAL REGENERATION ON A BATCH BASIS IS GENERALLY PRACTICED TODAY, UTILIZING CHLORINE AND/OR HYDROGEN PEROXIDE TO RE-OXIDIZE THE CU(+), FORMED BY THE ETCHING PROCESS, BACK TO CU(2+). THESE PROCESSES SUFFER THE DISADVANTAGE OF RESULTING IN A NET INCREASE IN SOLUTION INVENTORY WHICH MUST BE DISPOSED. STRONG ENVIRONMENTAL AND COST INCENTIVES EXIST FOR DEVELOPMENT OF AN EFFICIENT ELECTROLYTIC REGENERATION PROCESS. PHASE I WILL COMPRISE THE CONSTRUCTION AND OPERATION OF A FLOW LOOP TO DEMONSTRATECONTINUOUS ETCHANT REGENERATION, MAINTAINING STEADY STATE CONCENTRATIONS OF CUCL2, CUCL AND HC1, WITH AVOIDANCE OF THEPARASITIC ELECTROCHEMICAL REACTIONS OF CHLORINE AND HYDROGENEVOLUTION. AT THE SAME TIME, CATHODICALLY GENERATED COPPER METAL WILL BE EXTRACTED FROM THE SYSTEM, BALANCING THAT CONSUMED IN THE ETCHING PROCESS. THE PROPOSAL CONCERNS DEVELOPMENT OF AN ELECTROLYTIC PROCESSFOR THE ON-LINE REGENERATION OF ACID CUPRIC CHLORIDE ETCHING BATHS. CHEMICAL REGENERATION ON A BATCH BASIS IS GENERALLY PRACTICED TODAY, UTILIZING CHLORINE AND/OR HYDROGEN PEROXIDE TO RE-OXIDIZE THE CU(+), FORMED BY THE ETCHING PROCESS, BACK TO CU(2+). THESE PROCESSES SUFFER THE DISADVANTAGE OF RESULTING IN A NET INCREASE IN SOLUTION INVENTORY WHICH MUST BE DISPOSED. STRONG ENVIRONMENTAL AND COST INCENTIVES EXIST FOR DEVELOPMENT OF AN EFFICIENT ELECTROLYTIC REGENERATION PROCESS. PHASE I WILL COMPRISE THE CONSTRUCTION AND OPERATION OF A FLOW LOOP TO DEMONSTRATECONTINUOUS ETCHANT REGENERATION, MAINTAINING STEADY STATE CONCENTRATIONS OF CUCL2, CUCL AND HC1, WITH AVOIDANCE OF THEPARASITIC ELECTROCHEMICAL REACTIONS OF CHLORINE AND HYDROGENEVOLUTION. AT THE SAME TIME, CATHODICALLY GENERATED COPPER METAL WILL BE EXTRACTED FROM THE SYSTEM, BALANCING THAT CONSUMED IN THE ETCHING PROCESS. THE PROPOSAL CONCERNS DEVELOPMENT OF AN ELECTROLYTIC PROCESSFOR THE ON-LINE REGENERATION OF ACID CUPRIC CHLORIDE ETCHING BATHS. CHEMICAL REGENERATION ON A BATCH BASIS IS GENERALLY PRACTICED TODAY, UTILIZING CHLORINE AND/OR HYDROGEN PEROXIDE TO RE-OXIDIZE THE CU(+), FORMED BY THE ETCHING PROCESS, BACK TO CU(2+). THESE PROCESSES SUFFER THE DISADVANTAGE OF RESULTING IN A NET INCREASE IN SOLUTION INVENTORY WHICH MUST BE DISPOSED. STRONG ENVIRONMENTAL AND COST INCENTIVES EXIST FOR DEVELOPMENT OF AN EFFICIENT ELECTROLYTIC REGENERATION PROCESS. PHASE I WILL COMPRISE THE CONSTRUCTION AND OPERATION OF A FLOW LOOP TO DEMONSTRATECONTINUOUS ETCHANT REGENERATION, MAINTAINING STEADY STATE CONCENTRATIONS OF CUCL2, CUCL AND HC1, WITH AVOIDANCE OF THEPARASITIC ELECTROCHEMICAL REACTIONS OF CHLORINE AND HYDROGENEVOLUTION. AT THE SAME TIME, CATHODICALLY GENERATED COPPER METAL WILL BE EXTRACTED FROM THE SYSTEM, BALANCING THAT CONSUMED IN THE ETCHING PROCESS.