DEVELOPMENT AND EVALUATION OF LONG LIFE LIQUID METAL ION SOURCES OF BORON AND ARSENIC

THE RESEARCH OUTLINES IN THE PROPOSAL DEALS WITH HIGH BRIGHTNESS, LIQUID ALLOY ION SOURCES (LAIS) THAT CAN BE USED IN MASS SEPARATED FOCUSING COLUMNS TO PROVIDE SUBMICRON FOCUSED BEAMS OF SPECIFIED ION SPECIES. IN PARTICULAR WE PROPOSE TO DEAL WITH THOSE LAIS THAT PROVIDE DOPANT IONS OF AS AND B THAT CAN BE EMPLOYED IN MASKLESS IMPLANTATION OF SILICON BASED IC DEVICES. THE SPECIFIC OBJECT OF THE PHASE I RESEARCH IS TO BRING ABOUT THE DEVELOPMENT OF INCREASED LIFETIME AND EMISSION PERFORMANCE OF LAIS THAT PROVIDE B(+) AND AS (+2) DOPANT IONS. TO THIS END THE RESEARCH WILL FOCUS ON NEW CONCEPTS IN THE LAIS CONFIGURATION SO THAT NOT ONLY IMPROVEMENT IN SOURCE PERFORMANCE WILL BE REALIZED BUT, HOPEFULLY, A MORE VERSATILE LAIS GEOMETRY WILL BE DEVELOPED THAT WILL BE COMPATIBLE WITH MANY ALLOYS. THE SPECIFIC SOURCE CHARACTERISTICS TO BE MEASURED ARE SOURCE LIFE, ANGULAR INTENSITY AND ENERGY SPREAD OF THE VARIOUS BEAM SPECIES.