SBIR/STTR Research Award

REPLICONS ENCODING SUICIDE GENES AS THERAPIES FOR GLIOMA

Award identifier cbdd3442eb1fa99495cb2d3531021e68a63e7095029ca4cec23c59dd93c7f8c4Awarding agency Department of Health and Human Services

Award amount

$163,221

Program and phase

SBIR · Phase I

Award year

1999

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Award details

Awarding agency
Department of Health and Human Services
Branch
Not reported
Recipient company
REPLICON TECHNOLOGIES, INC.
Proposal award date
Not reported
Contract end date
Not reported
UEI
Not reported
Solicitation number
Not reported
Topic code
Not reported

Research abstract

Not Available In this project, a new kind of micromachined spatial light modulator (μSLM) will be developed for gray-scale, 360¿ control of optical phase using a large segmented mirror array. The core innovation will be the integration of a micromachined mirror array with complementary metal-oxide semiconductor (CMOS) electronic drive array on a single wafer. A low-temperature microfabrication process developed in Phase I will enable fabrication of the required microelectromechnical systems (MEMS) directly on a CMOS wafer. In this low-temperature fabrication process, patterned thin layers of metal structural layers and polymer sacrificial layers will be built up through sequential deposition and lithography. Ultimately, the sacrificial layer will be etched away, leaving a self-assembled, integrated opto-electromechanical device. Each pixel in the 256x256 element array will consist of a low voltage electrostatic actuator capable of altering the phase of reflected light by up to one wavelength for visible light, with resolution of 1 part in 256. Mirror elements will be optically flat and smooth. The array will be digitally updated at a rate of 1kHz. Light modulation will be phase-only, with unity amplitude. Mirror fill factors of 80 will be achievable for square pixel sized from 20 to 30 micrometers on a side.

Technology keywords

Not reported

Agency intelligence

Department of Health and Human Services

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