SBIR/STTR Research Award
REPLICONS ENCODING SUICIDE GENES AS THERAPIES FOR GLIOMA
Award amount
$163,221Program and phase
SBIR · Phase IAward year
1999Award details
- Awarding agency
- Department of Health and Human Services
- Branch
- Not reported
- Recipient company
- REPLICON TECHNOLOGIES, INC.
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- Not reported
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
Not Available In this project, a new kind of micromachined spatial light modulator (μSLM) will be developed for gray-scale, 360¿ control of optical phase using a large segmented mirror array. The core innovation will be the integration of a micromachined mirror array with complementary metal-oxide semiconductor (CMOS) electronic drive array on a single wafer. A low-temperature microfabrication process developed in Phase I will enable fabrication of the required microelectromechnical systems (MEMS) directly on a CMOS wafer. In this low-temperature fabrication process, patterned thin layers of metal structural layers and polymer sacrificial layers will be built up through sequential deposition and lithography. Ultimately, the sacrificial layer will be etched away, leaving a self-assembled, integrated opto-electromechanical device. Each pixel in the 256x256 element array will consist of a low voltage electrostatic actuator capable of altering the phase of reflected light by up to one wavelength for visible light, with resolution of 1 part in 256. Mirror elements will be optically flat and smooth. The array will be digitally updated at a rate of 1kHz. Light modulation will be phase-only, with unity amplitude. Mirror fill factors of 80 will be achievable for square pixel sized from 20 to 30 micrometers on a side.
Technology keywords
Not reported