MEMS Based Environmental Mon itoring Microsystem

Canopus Systems, Inc. proposes a feasibility study and conceptual design of an Environmental Monitoring Microsystem (EMN). This microsystems's front-end will be a modular suite of MicroElectroMechanical (MEMS) sensors which can changed or added-to in order to meet various applications, such as monitoring the health and environmental conditions of missile/weapon systems, measuring the shock/vibration experienced in airborne and ground facilities, or measuring the total environment in automotive or other transportation systems. Various sensing techniques will be investigated for the measurement of temperature, humidity, shock/vibration, strain, corrosion, and chemical out-grassing with emphasis on MEMS- based solution because of the MEMS potential for small size, low power and low cost batch fabrication. System architecture, power management, and packaging will be analyzed and optimized to achieve a small, flexible, low power, wireless electronic system capable of collecting and analyzing sensor data and alerting/reporting to a remote monitoring system. The starting point of the design of the EMM will be the University of Michigan Micro-instrumentation Cluster. Supplementing the SCI staff will be consultants from the University of Michigan's Center for Integrated Sensors and Circuits.