LARGE AREA HIGH TEMPERATURE SUPERCONDUCTING THIN FILMS

THE HIGH-TEMPERATURE SUPERCONDUCTING FILMS NOW DEPOSITED IN SITU ARE LARGE ENOUGH FOR RESEARCH PURPOSES AND FOR PRODUCTION OF A LIMITED NUMBER OF DEVICES. BUT MOST PRACTICAL DEVICES AND CIRCUITS WILL REQUIRE HIGH-QUALITY FILMS ON LARGE SUBSTRATES. THIS PROJECT WILL DEVELOP A PROCESS FOR DEPOSITING HIGH-QUALITY FILMS OF YBA2CU3O7-D, WITH UNIFORM THICKNESS AND UNIFORM ELECTRICAL PROPERTIES, IN TECHNOLOGICALLY USEFUL SIZES--THAT IS, ON SUBSTRATES 2 TO 4 INCHES IN DIAMETER. TOOLS FOR MEASURING THE PROPERTIES OF THE LARGE FILMS LOCALLY, AS WELL AS IN THEIR ENTIRETY, WILL ALSO BE DEVELOPED. THE AVAILABILITY OFLARGE FILMS AND THE TOOLS FOR CHARACTERIZING THEM WILL ACCELERATE THE COMMERCIALIZATION OF HIGH-TEMPERATURE ELECTRONICS. THE HIGH-TEMPERATURE SUPERCONDUCTING FILMS NOW DEPOSITED IN SITU ARE LARGE ENOUGH FOR RESEARCH PURPOSES AND FOR PRODUCTION OF A LIMITED NUMBER OF DEVICES. BUT MOST PRACTICAL DEVICES AND CIRCUITS WILL REQUIRE HIGH-QUALITY FILMS ON LARGE SUBSTRATES. THIS PROJECT WILL DEVELOP A PROCESS FOR DEPOSITING HIGH-QUALITY FILMS OF YBA2CU3O7-D, WITH UNIFORM THICKNESS AND UNIFORM ELECTRICAL PROPERTIES, IN TECHNOLOGICALLY USEFUL SIZES--THAT IS, ON SUBSTRATES 2 TO 4 INCHES IN DIAMETER. TOOLS FOR MEASURING THE PROPERTIES OF THE LARGE FILMS LOCALLY, AS WELL AS IN THEIR ENTIRETY, WILL ALSO BE DEVELOPED. THE AVAILABILITY OFLARGE FILMS AND THE TOOLS FOR CHARACTERIZING THEM WILL ACCELERATE THE COMMERCIALIZATION OF HIGH-TEMPERATURE ELECTRONICS.