Development of Boron Nitride -Based Capacitors for High-Energy Density High Temperature Applications

Multilayer ceramic capacitors (MLCCs) are used in high-energy density storage and high frequency power switching device applications. High-energy density capacitors operating at excessive temperature are needed in several ballistic missile applications,electric guns, and high power microwave sources. High power capacitors are also critical elements to replace current mechanical and hydraulic actuators with electrically driven actuators and dramatically improve their reliability. The need for compact andlightweight pulsed power capacitor devices is a necessity for airborne applications and particularly crucial for spaceborne. We propose to develop for high power storage and high temperature needs a very low cost and high efficiency multi-capacitor chipsbased on insulating boron nitride thin layers and conductive aluminum and tantalum nitride as internal electrodes.The use of thin BN/Al stack layers to fabricate boron nitride -based ceramic capacitors will provide higher energy density, high breakdownvoltage, low loss, extended temperature range, and high reliability. Beside high power storage MLCC for BMDO applications, the integrated device might benefit IMS as power storage media for its implantable microsensors. IMS is aggressively pursuing theintegration of advanced sensor concepts into Si chip manufacturing processes. The BN -based capacitor will be targeted at $3.5 B ceramic capacitor market. The segment of this market is growing at a 14% annual rate.