SBIR/STTR Research Award

Surface Micromachined Arrays of Transition-Edge Detectors

Award identifier 09207a4cf7a7e4ed3f9db1d12e675874cca362cb9ccf0a202a3541cc16677fd9Awarding agency National Aeronautics and Space Administration

Award amount

$69,942

Program and phase

SBIR · Phase I

Award year

2004

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Award details

Awarding agency
National Aeronautics and Space Administration
Branch
Not reported
Recipient company
STAR CRYOELECTRONICS, LLC
Proposal award date
Not reported
Contract end date
Not reported
UEI
ES5SR32JX1L8
Solicitation number
Not reported
Topic code
Not reported

Research abstract

An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters. This technique enables individual TES microcalorimeters to be suspended on a thin membrane for thermal isolation from the bath temperature. The TES detectors are fabricated from normal metal/superconductor bilayers with a transition temperature of around 0.1 K. The proposed surface micromachining technique will simplify the fabrication of closely-packed TES microcalorimeter arrays, which are needed for numerous applications in astronomical x-ray spectroscopy.

Technology keywords

Not reported

Other awards by this recipient

Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.

Research funding history

41 SBIR/STTR records share this UEI (2000–2024). Reported award amounts total $13,691,420. Reported amounts are not federal obligations.

Phases: Phase I, Phase II

Agencies: Department of Energy, National Aeronautics and Space Administration, Department of Commerce, Department of Health and Human Services

Agency intelligence

National Aeronautics and Space Administration

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