SBIR Phase I: A High-Throughput Scanning Probe Microscope Using Micromachined Ultracompliant Probe Arrays with Embedded Sensors for Simultaneous Topography and Thermal Imaging

The Small Business Innovation Research (SBIR) Phase I project will develop a high throughput scanning probe microscopy system for measuring topography and thermal parameters in nanotechnology, bio and semiconductor applications. The need for higher throughput in scanning probe microscopy will be addressed using ultracompliant probe arrays in which multiple tips scan in parallel; thus, making it possible for many of these arrays to operate simultaneoulsy on a sample with minimal contact force and without mechanical feedback. The proposed technology will fill a critical need in markets that rely on sub-micron microscopy. The proposed system will provide faster measurements, thereby contributing to higher productivity and cost reduction. In addition, it will benefit R&D, failure analysis and off-line engineering.