Miniature Transformers for Millimachined Instruments

Milli Sensor Systems & Actuators, Inc., is in the process of developing miniature GYROSCOPES and ACCELEROMETERS using millimachining technology which takes advantage of batch processing to develop instruments with high reliability and low cost. During the development process precision differential capacitive position sensors, with excellent stability and noise characteristics, have been designed. The electronic circuitry developed to optimize these characteristics use precision differential current transformers. However miniaturized transformers with the desired size and electrical characteristics are not available at the present time. We propose to design transformers manufactured by the millimachining technology used in the development of the precision inertial instruments. The miniature precision differential current transformers would be fabricated using batch processing techniques and would be capable of being integrated with the differential capacitors position sensors internal to the inertial instruments. The result would be an optimization of the performance as well as the size and reliability of the Inertial Instruments.