Microfabricated Cylinder Rate Gyro for High "g" Applications

The Air Force requires "G hardened" miniature sensors for real time measurements during in-barrel and free-flight model testing. SatCon has identified and recently evaluated a microscopic version of a simple, robust, roll sensor geometry well suited for operation under extremelyhigh accelerations (tested to greater than 20,000 G in full size versions). The cylindrical resonator is electrostatically excited to produce a standing acoustic mode around its rim. Roll induce position shift of the nodal positions is sensed capacitively. The Phase I work will build upon SatCon's previous work but be tailored for the increased roll range and the high acceleration operation of hypervelocity Range G. These requirements combined with shorter response time will require operation at higher frequency and lower Q. Test structures compatible with the resulting mechanical and electronic design will be fabricated by the LIGA deep etch process with SatCon's subcontractor, LSU, and electronically driven for mechanical resonance excitation. The designs, test results, and test structures will be provided to the Air Force at the end of the project. For Phase II, prototype versions of theresonators will be fabricated from a fill set of masks and tested with drive and sensing electronics. At the end of the Phase II a set of operational roll sensors integrated with electronics will be delivered.