Single Chip RRAPDS Compatible Sensor Suite

"Morgan Research proposes a Phase I SBIR effort to develop an integrated MEMS sensor suite suitable for munition and missile health monitoring systems. This suite will include a three-axis accelerometer, a three-axis no-power shock sensor, a humiditysensor, and a temperature sensor. These sensors will be fabricated in a robust silicon-on-insulator (SOI)-based fabrication technology, and be modifications of devices already in existence. The Phase I effort is designed to perform all of the analysis anddesign required to being fabrication. A successful Phase I will lead to a Phase II in which prototype devices are fabricated and characterized in harsh environments. The proposed integrated sensor suite has application to a wide variety of militarysystems, including THAAD, Patriot, TOW, and rotary- and fixed-wing aircraft. There are also applications in the commercial sector health monitoring and general environmental sensing in automobiles, boats, and other expensive assets that require periodicmaintenance. Furthermore, the device, if small enough, could find potential markets in the transport of food and other items sensitive to environmental conditions."