Microfabricated Silicon Carbide Heat Flux Sensor

The goal of this project is to develop new high-temperature heat flux sensors for heat transfer measurements in turbomachinery. The following obejctives will be pursued. Pototype sensors will be demonstrated which function at temperatures as high as 600C with a frequency response up to 50kHz. Using microfabrication techniques, miniature sensors will be produced for better than 0.1 mm spatial resolution. Batch fabrication techniques allow large arrays to be be produce inexpensively to measrue heat transfer over several square centimeters. Development of prototype divices and preliminary testing will be conducted by Advanced MicroMachines Incorporated. These sensors will exploit the high-temperature capabilities of siliocon carbide, using silicon carbide fabrication facilities available to AMMI. Successful development will result in a sensor technology that provides new capabilities for both commerical and military turbomachinery applications. This technology will allow both commerical and military manfacturers to develop more efficient and better performing engines and turbines.