SBIR/STTR Research Award
ATOMIC LAYER EPITAXY OF DIAMOND FILMS
Award amount
$500,000Program and phase
SBIR · Phase IIAward year
1992Award details
- Awarding agency
- Department of Defense
- Branch
- Missile Defense Agency
- Recipient company
- AERODYNE RESEARCH INC
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- HTMHV7AL9A86
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
WE ARE DEVELOPING A MOLECULAR BEAM EPITAXY APPROACH TO GROW EPITAXIAL DIAMOND THIN FILMS FOR ELECTRONIC DEVICES. WITH HALOGEN ATOMS AND HALOCARBON FREE RADICALS TO CONTROL THE DEPOSITION WE WILL OVERCOME THE PROPENSITY OF TYPICAL DIAMOND DEPOSITION PROCESSES TO GROW 3-DIMENSIONAL MICRO-CRYSTALLINE FILMS. IT THIS PROJECT SUCCEEDS, WE WILL DEVELOP A HIGH-SPEEED AND/OR HIGH POWER ELECTRONIC DEVICE TECHNOLOGY FROM DIAMOND FILMS.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Airborne Spectroscopic Static Temperature Sensor
- Real-time mapping of dissolved sulfur in soil with high spatial and temporal resolution
- Autonomous Method to Quantify and Localize Hydrogen Facility Emissions
- Autonomous Method to Quantify and Localize Hydrogen Facility Emissions
- Autonomous Shortwave Spectroradiometer for Retrieval of Cloud Properties from Marine Platforms
Research funding history
410 SBIR/STTR records share this UEI (1983–2025). Reported award amounts total $116,799,166. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Defense, Department of Energy, National Aeronautics and Space Administration, National Science Foundation, Environmental Protection Agency, Department of Commerce