Ultra-High Vacuum Compatible Wavelength Dispersive X-ray Spectrometer

Parallax Research, Inc. proposes to build an Ultra-High Vacuum compatible Wavelength Dispersive X-ray Spectrometer (WDS) that can be used on small spot Auger, XPS, TEM and FESEM analytical instruments for elemental analysis. The effort draws upon Parallax's experience in designing WDS systems for Scanning Electron Microscopes (SEM) and for XRF. This new type of x-ray spectrometer will eliminate the sources of leakage that plagued previous WDs systems used on UHV systems by using UHV compatible materials, motion feedthroughs and by replacing the leak prone gas flow proportional counter x-ray detector. During Phase 1, Parallax tested a potential proportional counter replacement with sufficient success to be very confident of Phase 2 success. The proposed spectrometer is conceptually based on Parallax's new 6-diffractor HeXLEXS extended energy range Wavelength Dispersive X-ray Spectrometer. COMMERCIAL APPLICATIONS: The largest and most direct commercial application of this technology will be for a WDS system to be used on Transmission Electron Microscopes. Although it is intended for use on a small spot Auger system, these represent only a few systems/yr. In addition, the technology will by immediately applicable for WDS systems to be used on Field Emission Scanning Electron Microscopes (FESEM) where manufacturers are hesitant to warranty systems with existing WDS spectrometers.