SBIR/STTR Research Award
Cryo-Radical Chemistry and Cluster Beam Deposition
Award amount
$59,546Program and phase
SBIR · Phase IAward year
1995Award details
- Awarding agency
- Department of Defense
- Branch
- Missile Defense Agency
- Recipient company
- IONWERKS INC
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- XFHSJJLN7ZQ7
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
A unique approach to formation of nitride materials using matrix isolation methods will be attempted. Large quantities of reactants can be prepared and forced to react under much more controlled conditions than in CVD or MBE. Important issues that will be addressed are epitaxial growth and growth rates, both of which can potentially be better than MBD. A very promising cluster beam approach will also be investigated which may be useful in its own right. However, if both are successful approaches, they will be combined in Phase II. This work promises a new approach to nitride growth. Both the resulting materials and the equipment to make them would be saleable.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Nanoparticulate Coatings Enhance Ion Detection
- Diode lasers and Small Nanoparticulate Matrices Combine to Elevate Sensitivity of MILDI-MSI
- Miniature Recoil Ion Mass Spectrometer enables correlative elemental isotopic and backscatter analysis from solid nanovolumes
- Nanoparticulate Coatings Enhance Ion Detection
- Gas Phase Synthesis and Implantation of Metastable Intermolecular Compounds (MICs)
Research funding history
65 SBIR/STTR records share this UEI (1986–2021). Reported award amounts total $17,405,049. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Health and Human Services, Department of Defense, National Aeronautics and Space Administration, Department of Energy, National Science Foundation