Ultraviolet Generation by Atmospheric Pressure Micro-Hollow Cathode Discharges

A new deep-ultraviolet light source has been developed which employs a microhollow cathode discharge formed in cathode cavities with dimension on the order of 100¿n¿Ym. The hollow-cathode lamp has numerous advantages over other light sources, includingoperation at relatively low voltages in a quiescent DC or repetitively pulsed mode, linear control of the intensity by controlling the current, scalability to large areas in a planar geometry, and a radiant emittance exceeding that of commerciallyavailable excimer lamps by more than an order of magnitude. This proposal describes a program to address and resolve key issues for converting this developmental ultraviolet source into a practical, manufacturable light system for use in a number ofapplications. This program will lead to the production of a low cost, high radiant emittance, long lifetime, large area excimer lamp which can cover a wavelength range from 76 nm to 308 nm. Applications of these novel excimer lamps are in UVpolymerization and surface photo-chemistry, photolithography, bacterial decontamination, pollution control and pollutant decomposition, and lighting This work will lead to a low cost, high efficincy light source which can provide cost/performance benefitsover existing light sources in the areas of UV curing, photolithography (including semiconductor), bacterial decontamination of surfaces, pollution control and lighting applications.