Compact NIR Spectral Radiometer For CVD Non-contact Temperature Measurements

We propose to develop an instrument for feedback loop control of chemical vapor deposition (CVD) processes. The research will include both process modeling and hardware development. At present, quantitative temperature measurement using optical emission is possible only if the thermal emissivity is known. The innovation will be the incorporation of novel emissivity models into a compact NIR spectral radiometer. The core of the spectrometer will be a dielectric stack "wedge" filter used with an InGaAs photodiode array. Our goal will be a measurement accuracy of 1oC at 1 Hz repetition rates during both low and high temperature (50-1000oC) CVD. Feasibility will be demonstrated during Phase I by utilizing the modeling with a grating-based InGaAs photodiode array spectrometer featuring no moving parts and rapid spectral measurement will be developed. This spectrometer will be used to verify the technology on actual CVD systems. The modeling activity will be performed with the collaboration of the New Jersey Institute of Technology as a benefit of their DARPA ManTech program "Multi-Wavelength Imaging Pyrometry for Semiconductor Process Monitoring and Control (F33615-92-C-5817). ANTICIPATED BENEFITS: The RF and gaseous environments in CVD reactors makes it difficult to accurately measure temperature electronically (thermocouples, thermistors, etc.). The ability to accurately and rapidly measure temperatures from outside the chamber will allow process control techniques to be used to greatly improve manufacturing efficiencies.